An investigation has been conducted of laser-stimulated microstructure processes of
defect generation and self-organization on Si surface, and accelerated implantation of
impurities in semiconductors. The solid-phase destruction of a surface under submicrosecond
laser pulses has also been studied.
It has been shown that solid-phase destruction is due to generation, growth and
accumulation of dislocations.
Luminescence of thin metallic plates and films, excited by plastic deformation under laser
pulses, has been examined to reveal that pulsed laser induced thermal deformation of brittle
refractory metals (tungsten and molybdenum) causes non-thermal glow (mechanoluminescence)
due to activation of "dislocation-dislocation" and "dislocation-impurity atom" interactions.
